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ADVANCES IN INDUSTRIAL ENGINEERING AND MANAGEMENT
ISSN:2222-7059 (Print);EISSN: 2222-7067 (Online)
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Title : Investigation of the Effects of Geometrical Parameters on Sensitivity of Capacitive MEMS Accelerometer
Author(s) : Keya Sanyal, Kalyan Biswas
Author affiliation : ECE Department, MCKV Institute of Engineering, Liluah, Howrah, WB, India
Corresponding author img Corresponding author at : Corresponding author img  

Abstract:
MEMS technology is rapidly taking an important role in todays and future sensor systems. MEMS are able to lower the device size from millimeter to micrometer and maintain and sometimes surpass the performance of conventional devices. In this paper design of a two-axis capacitive accelerometer is described. A finite element analysis method is used to perform the simulation of the Accelerometer under various operating conditions and to determine the optimum configuration. Variation of capacitance of the device with applied acceleration as well as sensitivity of the device is analyzed. From the analysis results, a capacitive MEMS accelerometer with enhanced sensitivity has been proposed. The sensitivity of the accelerometer has efficiently been enhanced. The effects of geometrical parameters of the Accelerometer were analyzed.

Key words:MEMS; capacitive accelerometer; sensitivity; finite element analysis

Cite it:
Keya Sanyal, Kalyan Biswas, Investigation of the Effects of Geometrical Parameters on Sensitivity of Capacitive MEMS Accelerometer, Advances in Industrial Engineering and Management, vol. 5, no. 1, 2016, pp. 103-107, doi: 10.7508/aiem.2016.01.021

Full Text : PDF(size: 490.39 kB, pp. 103-107, Download times:238)

DOI : 10.7508/aiem.2016.01.021

References:

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